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SiC Webinar December 2022 - On Demand StdTpc-Documentation/Training 1 This Standard partially specifies

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1  This Standard partially specifies the FOUPs used to transport and store 300 mm wafers in an IC manufacturing facility

bear risks in execution and lead to high maintenance costs

Because these guides are not formal specifications but are suggestions from which a specification can evolve

including leading IDM

SiC Webinar December 2022 - On Demand StdTpc-Documentation/Training 1 This Standard partially specifies

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